Free Declaration in Support - District Court of California - California

Case 5:07-cv-05248-JW

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Curriculum Vitae

Alexander D. Glew, Ph.D., P.E.
Expertise
Semiconductor Processing Semiconductor Equipment Low k dielectric films Plasma Processing Thin Film Characterization Ultra High Purity Gas and Chemical Delivery Systems Vacuum Systems Corrosive Gas Technology Finite Element Analysis (FEA) Project turnaround Related market segment analysis Professional Engineer (PE)

Employment History
From: To: 1997 Present Position: Glew Engineering Consulting, Inc. Mountain View, California President Clients include companies from semiconductor equipment, plasma generation, vacuum systems, fluid delivery systems, flow and pressure component suppliers, laser manufacturers, and others. Consulting work includes thin film characterization, process development, project turn-around/rescue, gas flow and vacuum metrology, design of experiments, corrosive gas applications, finite element analysis and related market analysis. Applied Materials, Inc. Santa Clara, California Engineering Manager, Core-Technologist Sat on corporate engineering/technology (ET) council, one of 15 council members. Responsible for corporate direction in gas delivery technology for all divisions, including CVD, PVD, etch, thermal and others. Also, qualified gas and vacuum component selections. Consulted with all divisions on gas and vacuum systems, and component and supplier selections. Successfully proposed and executed a project that SEMATECH S100 funded. The goal was to develop industry methods to determine the effects of trace chemicals on semiconductor processing and equipment reliability. This resulted in two SEMATECH Technology Transfers listed below. First, ppb levels of impurities were introduced into both a Tungsten CVD deposition process and an aluminum etching process. The effect on particle generation, deposition rate, GLEW EXHIBIT C

From: To:

Aug 1987 Jan 1997 Titles Project Mgr. Jan 1996 to Jan 1997

Alexander D. Glew, P.E.

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Curriculum Vitae
CVD Supplier Quality Engineering Manager uniformity, selectivity and incorporation into the film were examined. This work resulted in a 30% increase in deposition rate. Similarly, ppb-ppm levels of impurities were introduced into HBr gas systems and accelerated lifetime tests were conducted at three sites across the country. Responsible for gas, vacuum and chemical components evaluation, testing and supplier quality management. Managed an engineering group that tested and recommended gas, vacuum and chemical components for the CVD division, and developed process controls at suppliers. Supervised laboratory and trained individuals to develop specialized testing capabilities to characterize gas delivery and vacuum components. Also supported Etch, PVD and other divisions with common suppliers including vacuum pumps, vacuum transducers, flow controllers, valves and similar. Managed group of engineers and support personnel who developed gas panels and liquid source delivery systems for dielectric deposition. Delivered TEOS, TMP, TMB and other organometallic low-pressure liquids for SG, BPSG dielectric deposition. Also, started and managed the customer engineering special group for the CVD division, which engineered all equipment modifications to meet customer specifications. These modifications included changes across the entire system, including process chambers, vacuum systems, gas delivery, power distribution, safety and robotics. Worked on the development and release of the landmark product, Precision 5000 CVD, one of which is now in the Smithsonian Institute. This was the first cluster tool for semiconductor manufacturing. Responsible for flow and vacuum equipment suppliers for company including MFC, valves, mechanical vacuum pumps, cryo-pumps, dry pumps, and others. Supported multiple divisions on these matters.

Core Technologist

CVD Engineering Manager

Systems Engineer

From: To:

1996 2002

Stanford University Stanford, California PhD. Completed a dissertation in the department of Materials Science & Engineering leading to the Ph.D. degree. Research includes: Plasma Deposition of Diamond-Like Carbon and Fluorinated Amorphous Carbon and the Resultant Properties and Structure Investigation of deposition mechanism fluorinated amorphous carbon (FLAC) and diamond-like carbon (DLC).

Alexander D. Glew, P.E.

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Curriculum Vitae
Modeled and conducted experiments on mechanism of ion energy, momentum and flux dependence for FLAC and DLC film synthesis in radio-frequency plasma discharges, including competing mechanisms of sub-plantation, ion-peening, sputtering, and etching. Constructed and instrumented a multi-purpose processing chamber for CVD, etch, and sputtering with measurement capability. Fabricated MIS capacitors to investigate the dielectric properties of fluorinated amorphous carbon (FLAC). Performed all wafer processing to construct MIS capacitors, including lithography, etch, CVD and PVD. Conducted thin film analysis including UV absorption spectroscopy, spectral ellipsometry, multi incident angle ellipsometry, Fourier transform infrared spectroscopy, profilometry, nano-indentation, and gravimetric measurements. Modeled dielectric properties and dispersion relationship of fluorinated amorphous carbon (FLAC), and compared spectral ellipsometric measurements to results of electrical CV tests and thickness measurements by profilometry using MIS structures.

Consulting History (Partial)
From To: Dec 2007 Dec 2007 Duties Apr 2007 Oct 2007 Duties Damage analysis for insurance valuation. Analysis of damage to equipment from a chemical leak. Semiconductor equipment Finite element analysis of temperature distribution leading to safety issues and analysis of emergency conditions. Unicor Analysis by FEA and approval of mechanical engineer. Altactel Consulting on semiconductor manufacturer's processes that lead to IC failures. structures as a licensed

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From: To:

Apr 2007 Oct 2007 Duties

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2007 Present Duties:

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2002 Present Duties:

Consulting with financial analysts on semiconductor industry through Gerson Lehrman Group. Provided on the spot analysis of new technologies, companies, and

Alexander D. Glew, P.E.

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Curriculum Vitae
products within the semiconductor and related industry. March 2004 Present Duties: AIU Hsinchu, Taiwan Analysis of complete destruction of FAB due to facility design, equipment design, installation, process monitoring and control, etc... Arbitration. Potential litigation in Taiwan. Rosemont Process, Division of Emerson Electric, Inc. Minneapolis, MN. Market analysis of process monitoring and control needs. Brooks Instrument, Division of Emerson Electric, Inc. Hattfield, PA, and Minneapolis, MN. Market analysis of semiconductor equipment needs with respect to fluid handling components. Lebar, Inc. Sunnyvale, CA System design and fluid delivery system design for plasma based photoresist strip (photoresist removal). High Speed Industries, Inc. Lake Elsinore, CA Market analysis of semiconductor equipment needs with respect to fluid handling components. Aeroquip (Division of Eaton Corp.) Ann Arbor, MI Reviewed new product entry (semiconductor fluid handling) prior to product engineering. Steag RTP Systems, Inc. San Jose, CA. Materials evaluation and testing for metallic reduction in thermal SiO2 films produced by rapid thermal processing (RTP) with steam. Cymer, Inc. San Diego, CA Project manager responsible for leading team through concept and feasibility studies for major product enhancement to Excimer laser used in deep ultraviolet lithography. Millipore, Inc.

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From: To:

June 2004 Nov 2004 Duties: Oct 2000 March 2001 Duties:

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Apr 2000 Oct 2000 Duties:

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Dec 1999 2000 Duties:

From:

May 1999 Duties:

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Sep 1999 Nov 1999 Duties:

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Sep 1998 Aug 1999 Duties:

From:

Jan 1997

Alexander D. Glew, P.E.

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Curriculum Vitae
To: Sep 1998 Duties: Rancho Bernardo, CA Established a metrology group responsible for vacuum and flow measurements. The metrology is used in the manufacture and service of instruments for semiconductor process equipment. Established statistical process control for production metrology equipment. Led development team for new mass flow control device.

Litigation Support Experience
Client Case Project: Status Client Case Not disclosed yet. IC v. IC manufacturer patent case. Filed. Ropes and Gray (Entegris) Pall v. Entegris, 05-CV-5894 (BMC)(WDW), United States District Court, Eastern District of New York Patent dispute, filter patents. Filed.

Project: Status

Client Case

Project: Status Client Case Project: Status Client Case

Thelen Reid and Priest, San Jose, CA ( Celerity) Keith Slenkovich (attorney) Celerity vs. Ultra-Clean Technologies CASE NO. 05-CV-04374 MMC, United States District Court, Northern District of California Patent disputes, semiconductor processing equipment, ultra high purity gas delivery systems. Tried Hollister & Brace and White & Case (AMS) Sputtered Films Inc. vs. Advanced Modular Systems Trade secrets regarding semiconductor processing/equipment used for manufacturing cell phone ICs. Settled. Thelen Reid and Priest, San Jose, CA (Genmark) Rorbert Camors (attorney) Genmark Automation vs. Innovative Robotics Systems Inc. Case No. C07 05248 JW (PVT), United States District Court Northern District of California, San Jose Division Patent disputes, semiconductor processing equipment, wafer handling.

Project:

Alexander D. Glew, P.E.

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Curriculum Vitae
Status Client On hold. Morgan & Finnegan LLP, NY, NY ( ATMI) Kramer, Levin, Naftalis & Frankel LLP Ted Mlynar (attorney) ATMI vs. Praxair, Case No. 03 CV 5161, US District Court, Deleware Patent dispute, high purity hazardous chemical cylinder patents. Tried. Morgan & Finnegan LLP, NY, NY ( DuPont) William Feiler (attorney) Civil Action No. 04-C-4049, US District Court, Northern District of Illinois Eastern Division Rapak vs. DuPont Patent disputes. Settled. Cooley Goddard LLP, Broomfield, CO ( Advanced Energy) Jim Brogan (attorney) MKS Instruments Inc. vs. Advanced Energy C.A. No. 03-469 (JJF), US District Court, Deleware Patent dispute.

Case Project: Status Client

Case Project: Status Client Case Project

Client Case Project: Status

Kerr & Wagstaffe LLP, Attorneys (HT Components) General Components, Inc. V. HT. Components, U.S.A., Inc. Case No. C 01-20925 JF Review of breach of contract for semiconductor equipment components. Settled

Client Case

Project: Status Client Case

Shannon, Gracey, Ratliff & Miller LLP, Fort Worth, TX, (Thompson & Knight) Lawrence J. Knipp and Nykar Technologies L.P. vs. Raymond M. Galasso and Thompson & Knight, LLP Cause No. 153-191270-02 Reviewed patent prosecution malpractice. Settled Frommer Lawrence & Haug, New York, NY (TEL) Semitool Inc. vs. Tokyo Electron America, Tokyo Electron Kyushu Limited, Tokyo Electron Limited Stephen Lieb (attorney)

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Curriculum Vitae
Civil Action No. C 02 0288 CW (EMC) Patents: 4,985,722 Apparatus for coating a photo-resist film and/or developing it after being exposed 5,442,416 Resist processing method Settled Keker & Van Nest, San Francisco, CA, (ASM) ASM America, Inc. et al v. Genus, Inc. Stuart Gassner (attorney) Civil Action No. C 01-02190 EDL Patents: 6,015,590 Method for growing thin films. 5,916,365 Sequential Chemical Vapor Depositions. Settled Orrick Herrington & Sutcliffe, LLP ( Applied Materials) Gary Weiss (attorney) Applied Materials, Inc. v. LTD Ceramics et al U.S.D.C. Case No. C01-20478 JF PVT ADR Misappropriation of trade secrets. Settled

Project:

Status Client

Case Project:

Status Client Case Project: Status

Client Case

Project: Status Client Case Project: Status Client Case Project:

Knobbe Martens, Olsen Bear, Newport Beach, CA, (Air Products) Advanced Delivery & Chemical Systems v. Air Products and Chemical, Inc. Case A 99-CA-406 SS Patents for chemical delivery. Settled Mitsubishi Silicon America vs. Semitool, Inc. Harrang Long Gary Rudnick (Salem, OR) CV 98-826-AA Semiconductor equipment breach of contract. Settled Semitool, Inc. vs. Novellus Systems Irell & Manella (Los Angeles) C 98-3089 DLJ Patents: 4300581 Centrifugal Wafer Processor 5377708 Multistation Semiconductor Processor with Volitization 5222310 Single Wafer Processor with Frame. Settled

Status

Alexander D. Glew, P.E.

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Curriculum Vitae
Client Case Project: Status Client Case Project: Status Client Case Applied Materials, Inc. v. McDowell & Company, et al Orrick Herrington & Sutcliffe LLP (Menlo Park, CA) 3-98CV-907-R Misappropriation of trade secrets. Settled Applied Materials, Inc. v. David Biehl, et al Orrick Herrington & Sutcliffe LLP (Menlo Park, CA) CR95-20082 RMT PVT Misappropriation of trade secrets. Settled Micron Technology, Inc. v. Mosel Vitelic, Inc. Kirkland & Ellis (Chicago, IL) 337-TA-414 CIV98-0293-S-LMB CIV98-0294-S-LMB Patent 4436584: Anisotropic plasma etching of semiconductors Settled Hyundai Electronics Industries v. NEC Townsend and Townsend and Crew, LLP (Palo Alto, CA) 98-118-A 2:98cv0077 Patent 5,509,995 Process For Anisotropically Etching Semiconductor Material. Settled Hyundai Electronics America, Inc. v. Texas Instruments, Inc. : Penney & Edmonds (Palo Alto, CA) 98-648-A Patent 5,509,995 Process For Anisotropically Etching Semiconductor Material. Settled

Project: Status Client Case Project: Status Client Case Project: Status

Patents
Patent Number 7,118,090 6,679,476 6,204,174 Date Issued Jan 20, 2007 Jan. 20, 2004 Mar. 20, 2001 Title Control Valves Control Valves Method And Apparatus Rate Deposition Of Tungsten.

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Curriculum Vitae Educa tion
2003 1995 1987 1985 Stanford University Ph.D., Materials Science and Engineering Stanford University M.S., Materials Science and Engineering University of California, Berkeley M.S., Mechanical Engineering University of California, Berkeley B.S., Mechanical Engineering

Publications and Conference Presentations (selected).
A.D. Glew, M.A. Cappelli, "Characterization and dielectric properties of fluorinated amorphous carbon measured by capacitance-voltage versus spectral ellipsometry", Materials Research Society Symposium Proceedings, 593, Boston, MA, 1999, pp. 341346. A.D. Glew, M.A. Cappelli, "In situ plasma analysis, fluorine incorporation, thermostability, stress, and hardness comparison of fluorinated amorphous carbon and hydrogenated amorphous carbon thin films deposited on Si by plasma enhanced chemical vapor deposition", Material Research Society Symposium Proc., 565, San Francisco, CA 1999, pp 285-290. A.D. Glew, R. Saha, M.A. Cappelli and J.S. Kim, "Ion Energy and Flux Dependence of Diamond Like Carbon Film Synthesis in Radio-Frequency Discharges", International Conference on Metal Coatings and Thin Films, Surface and Coatings Technology 114 (1999) 224-229. A. Glew, R. Saha, M. Cappelli and J. Kim, "Ion Energy and Flux Dependence of Diamond Like Carbon Film Synthesis in Radio-Frequency Discharges", International Conference on Metal Coatings and Thin Films, San Diego, CA, April 1998 A. Glew, J, Ammenheuser, M. Crockett, A. Johnson, W. Dax, R. Binder, J. Riddle, "SEMASPEC 97043272A Accelerated Life Tests of Gas System Performance and Reliability," http://www.sematech.org/public/docubase/abstract/3272atr.htm. A. Glew, J. Ammenheuser, J. Riddle, A. Johnson, "SEMASPEC 96083175A-XFR Determining the Effects of Impurities on Semiconductor Thin Film Processing," http://www.sematech.org/public/docubase/abstract/3175axfr.htm. A Glew, "Selecting Gas Purity and Materials of Construction in High Purity Gas Systems," Semicon West Symposium on Corrosion, July 1997 A. Glew, J. Kim, K. Lee, M. Cappelli, "On the Characteristics of Diamond Like Carbon", Alexander D. Glew, P.E.

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Curriculum Vitae
B. International Conference on Metal Coatings and Thin Films, San Diego, CA, April 1997 A. Glew, D. Porter, "Gas System Reliability Testing in Chlorine", Semiconductor Fabtech, May 1996.

Professional Associations
American Society of Mechanical Engineers (ASME) Materials Research Society (MRS) International Code Council (ICC) SEMI

Professional License
Licensed Mechanical Engineer, State of California, M26690

Laboratory analysis
Laboratory analysis may be provided through supervised third party laboratories.

Technical Software Packages (selected)
AlgorTM: Multi-Physics Finite Element Analysis AlibreTM: Computer Aided Design MathematicaTM: general analysis MathCADTM : general analysis SPICE: circuit simulation

For more information please contact: Glew Engineering Consulting Inc. 282 San Antonio Road Mountain View, CA 94040 Tel: Fax: Email: Web: 650-641-3019 650-292-2210 [email protected] www.glewengineering.com

Alexander D. Glew, P.E.

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